Photolithography stepper, the kind of semiconductor processing equipment that uses AGC fused-quartz wafers as substrates

Photolithography

Quartz Wafers (AQ / QJ Grade)

High-purity synthetic quartz wafers in square and round formats from 4 to 12 inches for optical display and high-temperature poly-Si TFT applications.

Fused-quartz wafers (synthetic-quartz wafers) in both square and round formats, available in two principal grades depending on the end application. Each is a high-purity quartz substrate engineered for semiconductor processes that depend on thermal stability and chemical inertness.

Grade selection

CodeUseCharacteristic
AQOptical displaysNormal quartz
QJHigh-temperature poly-Si TFT displaysLow OH⁻, few impurities, low birefringence

Form factors

FormatSizeThickness
Square type4″ square – 8″ square0.5 – 3.0 mm
Wafer typeØ4″ – Ø12″0.5 – 3.0 mm

Wafers can be supplied with orientation flats or notches as required by your tooling. Custom thicknesses outside the standard range may be available; contact our Hillsboro team to discuss.

Purity

By inductively coupled plasma mass spectrometry (ICP-MS), all listed metallic impurities measure below 0.6 ppb, with most below 0.3 ppb. That is purity adequate for the most demanding semiconductor and display applications.

Applications

  • Optical displays (AQ grade)
  • High-temperature poly-Si TFT displays (QJ grade)
  • Glass wafers for advanced semiconductor processes

Documents

Documents available on request. Use the form below.

Specifications

Quartz Wafers specifications

Form factors
Square 4″–8″ and round Ø4″–Ø12″ with orientation flat or notch
Thickness range
0.5–3.0 mm
CTE (50–200°C)
0.6ppm/K
Refractive index (n_D)
1.46
Total metallic impurities (Fe, Na, Ti, Cr, Cu, K, Ca, Mg, Zn, Mn, Al)
< 0.6ppb each By ICP-MS analysis
Density
2.20g/cm³

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